Focused Ion Beam instrument (FIB) and Scanning Electron Microscope (SEM)

NTNU [The Norwegian University of Science and Technology]

FIB-SEM:
NTNU NanoLab is the core facility in NorFab for high resolution processing and characterisation, and the proposed FIB and SEM will primarily support high education, research and development for NorFab users. The objective of this procurement is to meet the needs of our NanoLab users. FIB-SEM will complete our current FIB-SEM system, now that the time on the instrument has increased to 3 500 hour per year and the demand is expected to increase.
Within the Norwegian cleanroom network Norfab, the NTNU NanoLab is the core facility for high resolution processing and characterisation. An existing FEI Helios Nanolab FIB-SEM system has been in use in cleanroom since 2009 and is used daily in a number of different research applications, including nano-structuring, tomography, TEM lamella preparations and clarification of samples for nano-mechanical testing. Use of time on the existing instrument has reached 3 500 hours/year, and it is expected that demand will continue to increase in the future.
The objective of this procurement is to relieve the increasing need for instrument availability and provide an updated instrument that can cover NanoLab's need for tools that can high resolution pattern and characterisation of different materials in a multi-user system. The suggested instrument/solution shall be used for high education and research on a number of applications and materials dictated by the steadily increasing need of NanoLab users.
SEM:
The suggested FIB and SEM will primarily support high education and research for NorFab users. The objective of this procurement is to meet the needs of our NanoLab users at NTNU NanoLab. SEM will be used as a characterisation tool as part of a process line based on lithography, thin film and EBL.
As a NorFab facility, there are several different lithography (optical, electron beam nano imprint) and thin film process lines on location at NTNU NanoLab. The objective of this procurement is to meet the increasing demand/need for a high performance, large chamber characterisation/inspection tool as part of these process lines. The proposed instrument/solution will support high education and research for NorFab users in a multi-user system.

Frist
Fristen for mottak av tilbud var 2016-06-13. Anskaffelsen ble publisert 2016-05-10.

Hvem?

• • NTNU [The Norwegian University of Science and Technology]

Hva?

• • Elektrisk maskineri, apparater, utstyr og forbruksvarer; Belysning › Elektroniske, elektromekaniske og elektrotekniske artikler
• • Mikroskoper › Elektronmikroskoper

Hvor?

• • Norge