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2011-07-04NTNU 2011-3319 magnetron and E-Beam sputter system (Norges Teknisk Naturvitenskapelige universitet (NTNU), Innkjøp)
The instrument shall be a combined magnetron sputtering and E-Beam evaporator system. The system shall be installed in an ISO5 clean room at the Awarding Authority’s nano laboratory. The instrument shall be used in connection with research and education on thin film deposits.
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